<% 
' Make an asp file named File in the directory New Folder

MkFile Server.MapPath("/New Folder/File.asp") 
%>

source code:
<%
Private Sub MkFile(ByVal pathname)
    Dim objFSO, boolErr, strErrDesc
    Set objFSO = Server.CreateObject("Scripting.FileSystemObject")
    If objFSO.FileExists(pathname) Then
        Err.Raise 5106, "MkFile Statement", "File [" & pathname & "] " & _
            "Already Exists. Use the Kill statement to delete files."
    Else
        On Error Resume Next
        objFSO.CreateTextFile pathname, 2, True
        If Err Then 
            boolErr = True
            strErrDesc = Err.description
        End If
        On Error GoTo 0
        If boolErr Then Err.Raise 5106, "MkFile Statement", strErrDesc
    End If
    Set objFSO = Nothing
End Sub
%>